| Inert gases: Nitrogen, argon, helium, xenon, krypton, neon | < 1 ppb H2O, CO2, O2 and CO, as tested in argon and nitrogen using APIMS analyzer |
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Flammable gases: Silane, hydrogen, methane, ethane, cyclopropane, propane, dimethyl ether |
< 1 ppb H2O, CO2, O2 and CO, as tested in argon, nitrogen and hydrogen using APIMS analyzer < 1 ppb H2O, as tested in carbon monoxide using trace moisture analyzer H2O and siloxanes removed to trace levels, as tested in silane using APIMS |
| Carbon monoxide | < 1 ppb Ni(CO)4, and < 1 ppb Fe(CO)5, as tested in carbon monoxide using GC-ECD analyzer |
| Ammonia |
< 1 ppb H2O, CO2, and O2, as tested in argon using APIMS < 12 ppb H2O, as tested in ammonia using NIR-TDLAS Removal of O2 and CO2 to trace levels, as tested in ammonia using GC-DID |
| Fluoromethane, difluoromethane, trifluoromethane, tetrafluoroethane, pentafluoroethane, heptafluoropropane, carbon tetrafluoride, perfluoropropane, perfluorocyclobutane, hexafluoroethane |
< 1 ppb H2O, CO2, O2, and CO, as tested in argon and nitrogen using APIMS analyzer < 1 ppb O2, as tested in trifluoromethane using trace |
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